The SEM has a large depth of field, high resolution, and a magnification of hundreds of thousands of times. It can be used to observe the surface of the sample and the microstructure of the section. For example, when the Energy Dispersive Spectrometer (EDS) is installed on the device, we can analyze the micro area of the sample surface at the same time, including qualitative and semi quantitative component analysis, and Point, Line Scan and Mapping analysis in the specific area, X.

Section observation of semiconductor chip